C7: MEMS Technology for adaptive Sensors

Technical systems that can interact with their environment must adapt their dynamics to changing environmental influences, as well as, enable a connection to electronic systems. A technical solution for this are micro-electromechanical systems (MEMS). The goal of this subproject is the development of a parametrically excited MEMS for acoustic sensing applications. For a targeted process design, important dynamic parameters of the MEMS actuators should also be set in relation to relevant geometrical and technology parameters. For this purpose, a simulation model is to be created in parallel with the development of the cantilever.