Group C7

MEMS Technology for adaptive Sensors

Technical systems that can interact with their environment must adapt their dynamics to changing environmental influences, as well as, enable a connection to electronic systems. A technical solution for this are micro-electromechanical systems (MEMS). The goal of this subproject is the development of a parametrically excited MEMS for acoustic sensing applications. For a targeted process design, important dynamic parameters of the MEMS actuators should also be set in relation to relevant geometrical and technology parameters. For this purpose, a simulation model is to be created in parallel with the development of the cantilever.


Project Management
Prof. Dr. Martin ZieglerDr. Tzvetan Ivanov
Doctoral Researchers
Vishal Vishnupant Gubbi


Next CRC-colloquium on Apr. 25, 2024: Rebecca Burkholz (CISPA Helmholtz Center for Information Security)


News from the ZEVS (CAU Kiel): Visit of the European Commission (Article only available in German - sorry!)


CRC-colloquium on February 12, 2024: Petro Feketa (Victoria University of Wellington, NZ): Video is online!