Group C7

MEMS Technology for adaptive Sensors

Technical systems that can interact with their environment must adapt their dynamics to changing environmental influences, as well as, enable a connection to electronic systems. A technical solution for this are micro-electromechanical systems (MEMS). The goal of this subproject is the development of a parametrically excited MEMS for acoustic sensing applications. For a targeted process design, important dynamic parameters of the MEMS actuators should also be set in relation to relevant geometrical and technology parameters. For this purpose, a simulation model is to be created in parallel with the development of the cantilever.

C7

Project management
Prof. Dr. Martin ZieglerDr. Tzvetan Ivanov
Doctoral researchers
Vishal Vishnupant Gubbi

News

CRC-colloquium on May 25, 2023: Suhas Kumar (Sandia National Laboratories, CA, USA): Video is online!

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Issue 14 of the quarterly CRC-Newsletter is now available (incl. IMNeuS23 in Münster)!

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New publication in Nature Electronics

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