Group C7

MEMS Technology for adaptive Sensors

Technical systems that can interact with their environment must adapt their dynamics to changing environmental influences, as well as, enable a connection to electronic systems. A technical solution for this are micro-electromechanical systems (MEMS). The goal of this subproject is the development of a parametrically excited MEMS for acoustic sensing applications. For a targeted process design, important dynamic parameters of the MEMS actuators should also be set in relation to relevant geometrical and technology parameters. For this purpose, a simulation model is to be created in parallel with the development of the cantilever.

C7

Project Management
Prof. Dr. Martin ZieglerDr. Tzvetan Ivanov
Doctoral Researchers
Vishal Vishnupant Gubbi

News

Book: Bio-inspired Information Pathways - From Neuroscience to Neurotronics is published!

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Finn Zahari successfully defends his PhD-thesis - summa cum laude!

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Issue 15 of the quarterly CRC-Newsletter is now available!

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