Group C7

MEMS Technology for adaptive Sensors

Technical systems that can interact with their environment must adapt their dynamics to changing environmental influences, as well as, enable a connection to electronic systems. A technical solution for this are micro-electromechanical systems (MEMS). The goal of this subproject is the development of a parametrically excited MEMS for acoustic sensing applications. For a targeted process design, important dynamic parameters of the MEMS actuators should also be set in relation to relevant geometrical and technology parameters. For this purpose, a simulation model is to be created in parallel with the development of the cantilever.

C7

Project Management
Prof. Dr. Martin ZieglerDr. Tzvetan Ivanov
Doctoral Researchers
Vishal Vishnupant Gubbi

News

# 19 of the CRC newletter is out now!

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CRC-colloquium on March 27, 2025: Abishek Sharma (University of Glasgow, Scotland): Video is online!

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Next CRC-colloquium on March 27, 2025: Dr. Abishek Sharma (University of Glasgow)

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